Associated dual interferometric measurement apparatus for determ

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer

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356361, G01B 902

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active

056593929

ABSTRACT:
The present invention relates to an apparatus and method for measuring physical properties of an object, such as thickness, group index of refraction, and distance to a surface. The apparatus includes a non-coherent light interferometer (53) and a coherent light interferometer (55) in association so as to share a variable optical path delay element (54). Thickness measurements can be made, for example, of solids, liquids, liquids moving along a horizontal plane, or liquids flowing down a plane. Thickness measurements of multiple layers can be made.

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