Assessment and optimization for metrology instrument...

Details Assessment and optimization for metrology instrument... Assessment and optimization for metrology instrument...

2007-10-03

2008-11-18

Pham, Hoa Q (Department: 2886)

Optics: measuring and testing

Dimension

C700S121000

Reexamination Certificate

active

07453583

ABSTRACT:
Methods and related program product for assessing and optimizing metrology instruments by determining a total measurement uncertainty (TMU) based on precision and accuracy. The TMU is calculated based on a linear regression analysis and removing a reference measuring system uncertainty (URMS) from a net residual error. The TMU provides an objective and more accurate representation of whether a measurement system under test has an ability to sense true product variation. The invention also includes a method for determining an uncertainty of the TMU.

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Banke et al., “Characteristics of accuracy for CD metrology,” Proceedings of SPIE, vol. 3677, 1999, pp. 291-308.

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