Semiconductor device manufacturing: process – Bonding of plural semiconductor substrates
Patent
1997-07-16
1999-11-09
Chaudhari, Chandra
Semiconductor device manufacturing: process
Bonding of plural semiconductor substrates
36446802, 36446821, H01L 2120
Patent
active
059813601
ABSTRACT:
This invention relates to a procedure for assembling two structures (2, 4) comprising:
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Fulbert Laurent
Rabarot Marc
Chaudhari Chandra
Commissariat a l''Energie Atomique
Jacobs Bruce F.
Sulsky Martin
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