Assembly for simultaneous observation and laser interferometric

Details Assembly for simultaneous observation and laser interferometric Assembly for simultaneous observation and laser interferometric

1992-08-14

1994-10-11

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356345, G01B 902

Patent

active

053552172

ABSTRACT:
Assembly for observation and laser interferometric measurements of articles contained in an enclosure includes a video camera and a laser emitter unit. The laser emitter unit has two laser diodes whose beams follow the optical path of the video camera. An illumination system also follows the optical path of the video camera. The entire assembly is incorporated into a single box. The assembly is utilized for the observation and measurement of thin-film structures, in particular integrated-circuit boards.

REFERENCES:
patent: 4358201 (1982-11-01), Makosch
patent: 4443106 (1984-04-01), Yasuda
patent: 4479848 (1984-10-01), Otsubo et al.
patent: 4770532 (1988-09-01), Ito
patent: 4984894 (1991-01-01), Kondo

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