Assembly comprising a sensor for determining at least one of...

Details Assembly comprising a sensor for determining at least one of... Assembly comprising a sensor for determining at least one of...

2006-09-26

2006-09-26

Kim, Peter B. (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S055000, C355S063000, C250S548000

Reexamination Certificate

active

07113257

ABSTRACT:
An assembly according to an embodiment of the invention includes a sensor for determining at least one of tilt and height of a surface of a substrate in a lithographic apparatus. The substrate is moveable along at least one path substantially parallel to the surface of the substrate with respect to the sensor. The lithographic apparatus has an exposure scanning direction and the assembly is arranged to move the substrate relative to the sensor along the at least one path and to provide measurement data about the at least one of tilt and height along the at least one path. The assembly includes a memory configured to store the measurement data for use during a later exposure of the substrate by the lithographic apparatus. The at least one path of the substrate is at least partly at an angle to the exposure scanning direction.

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“European Search Report dated Sep. 19, 2003”.

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