Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2007-05-21
2010-11-23
Kim, Peter B (Department: 2882)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S067000, C355S071000
Reexamination Certificate
active
07839482
ABSTRACT:
An assembly including a radiation reflector and a contaminant barrier is disclosed. The contaminant barrier is arranged to receive radiation from a radiation source and to reflect that radiation towards the radiation reflector, and the radiation reflector is arranged to reflect the radiation, received from the contaminant barrier, back towards the contaminant barrier.
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Soer Wouter Anthon
Van Herpen Maarten Marinus Johannes Wilhelmus
ASML Netherlands B.V.
Kim Peter B
Pillsbury Winthrop Shaw & Pittman LLP
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