Assembly and method for monitoring the alignment of a workpiece

Details Assembly and method for monitoring the alignment of a workpiece Assembly and method for monitoring the alignment of a workpiece

1988-07-12

1991-05-21

Willis, Davis L.

Optics: measuring and testing

By polarized light examination

With birefringent element

G01B 902

Patent

active

050170112

ABSTRACT:
An assembly and method for monitoring the alignment of a workpiece with respect to a reference. The assembly and method employ an element which preferably comprises a capability for optical phase conjugation. Advantage which can result from the use of the element include enhanced sensitivity to alignment variations for both large and very small angle deviations from the reference.

REFERENCES:
patent: 3729260 (1973-04-01), Walsh
patent: 3844660 (1974-10-01), Hunter

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