Aspect ratio program for optimizing semiconductor chip shape

Details Aspect ratio program for optimizing semiconductor chip shape Aspect ratio program for optimizing semiconductor chip shape

1997-09-08

2000-02-01

Teska, Kevin J.

3955002, G06F 1750

Patent

active

060212675

ABSTRACT:
A cost-based algorithm determines semiconductor chip aspect ratios which minimize lithographic processing costs and determines optimum chip matrices for various types of lithographic tools.

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