Artificial intelligence system for track defect problem solving

Details Artificial intelligence system for track defect problem solving Artificial intelligence system for track defect problem solving

2005-10-11

2005-10-11

Rodriguez, Paul (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S110000, C438S005000, C438S014000, C702S045000

Reexamination Certificate

active

06954678

ABSTRACT:
A system and method facilitating lithography defect solution generation is provided. The invention includes a defect solution component and a defect alert component. The defect solution component provides potential solution(s) to a defect within the lithography process utilizing artificial intelligence technique(s) (e.g., Bayesian learning methods that perform analysis over alternative dependent structures and apply a score, Bayesian classifiers and other statistical classifiers, including decision tree learning methods, support vector machines, linear and non-linear regression and/or neural network).

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