Articulated carrying device

Details Articulated carrying device Articulated carrying device

2006-03-28

2006-03-28

Underwood, Donald W. (Department: 3652)

Material or article handling

Horizontally swinging load support

Swinging about pivot

C074S490050, C901S015000

Reexamination Certificate

active

07018162

ABSTRACT:
A carrying device carries a semiconductor wafer above a base disposed in a transfer chamber or the like. The carrying device comprises pick for holding the object, a main arm mechanism adapted to bend and stretch in a horizontal operating plane, and an auxiliary arm mechanism adapted to bend and stretch in a vertical operating plane. The main arm mechanism includes a proximal end supported by the base, and distal end connected to the pick, respectively. The auxiliary arm mechanism includes a main arm and an arm linkage. The main arm has a proximal end supported by the base, and distal end. The arm linkage has a proximal end connected to the distal end of the main arm and a distal end connected to the pick.

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