Material or article handling – Apparatus for charging a load holding or supporting element... – With simultaneous charging and discharging of plural load...
Patent
1984-03-09
1986-10-28
Spar, Robert J.
Material or article handling
Apparatus for charging a load holding or supporting element...
With simultaneous charging and discharging of plural load...
198619, 414331, B65G 2500
Patent
active
046195734
ABSTRACT:
Wafer transport in the vacuum portion of an automated wafer processing machine is accomplished by means of an improved transport mechanism. The primary transport device is a rail guided, magnetically driven shuttle plate. Baffles serve to isolate the particle producing portions of the mechanism from the wafers. The major drive components are located inside the rails and outside the vacuum containment system. A pin lift apparatus located on the reactor chucks serves to remove and replace wafers on the shuttle plate. The disclosed apparatus provides efficient and reliable wafer transport with a minimum amount of particulate generation and is easily reconfigurable to single or multiple head machines.
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Air Powered Linear Transporter--Engineering Materials and Design (GB), vol. 22, No. 2, Feb. 1978.
Drake Herbert G.
Lachenbruch Roger B.
Mirkovich Ninko T.
Rathmann Thomas M.
Meyer Jonathan P.
Millman Stuart J.
Spar Robert J.
Tegal Corporation
Wille Paul F.
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