Article storage house in a clean room

Details Article storage house in a clean room Article storage house in a clean room

1993-01-21

1994-11-15

Bennett, Henry A.

Cleaning and liquid contact with solids

Apparatus

With plural means for supplying or applying different fluids...

34218, 141 98, B08B 300

Patent

active

053638670

ABSTRACT:
An article storage house in a clean room for airtightly accommodating a wafer cassette, etc. in which the wafer cassette carried in from the outside of an article carry-in/out portion is accommodated into a container by an automatic article delivery unit disposed in the article carry-in/out portion or it is carried in the article storage house while it is accommodated in the container and is stored in sections of the article storage house. An inert gas purge mechanism and an automatic container cleaning portion are disposed in the automatic article delivery unit or each section.

REFERENCES:
patent: 4724874 (1988-02-01), Parikh et al.
Article entitled "Super LSI Ultra Clean Technology Symposium", Tadahiro OHMI et al, published Nov. 19, 1990, pp. 63-80, (Japanese Language article with English translation incorporated therein).

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