Article handling device

Details Article handling device Article handling device

1975-06-19

1977-11-15

Spar, Robert J.

Conveyors, chutes, skids, guides, and ways

Skidways

92 99, 92101, 193 32, 198345, 198486, 198736, 221298, 294 99R, 302 2R, 408 70, F01B 1902

Patent

active

040582230

ABSTRACT:
A pin is integral with a diaphragm and extends from one side of the diaphragm. The other side of the diaphragm is subjected to a pressure or vacuum to create a pressure differential across the diaphragm to move the pin into or out of engagement with an article within a controlled environment. The diaphragm isolates a fluid, which produces the pressure differential across the diaphragm, from the controlled environment. In one embodiment, the pin is formed at the center of the diaphragm and moves only in a straight line. In another embodiment, the pin is formed eccentric to the center of the diaphragm so as to have a combination movement of angular and straight. The pin can be employed to stop an article such as a semiconductor wafer, for example, or to raise or to lower the wafer without the actuating fluid contaminating the controlled environment in which the semiconductor wafer is disposed.

REFERENCES:
patent: 2604574 (1952-07-01), Riddell
patent: 2817727 (1957-12-01), Schmeling
patent: 2900915 (1959-08-01), Rowell
patent: 2937788 (1960-05-01), Darsie
patent: 3121552 (1964-02-01), Wilson
patent: 3613518 (1971-10-01), Prosser
patent: 3898403 (1975-08-01), Grayson

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