Article comprising an inductor

Telecommunications – Transmitter and receiver at same station

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455 41, 455318, 336 87, 336134, 336178, 331361, 331181, 333167, 333174, H04B 138, H04B 500

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061013714

ABSTRACT:
An article comprising a micro-machined, passively self-assembling inductor is disclosed. The inductor is fabricated using MEMS technology and advantageously utilizes materials compatible with CMOS such that inductor is monolithically integrable with a CMOS chip. The inductor includes passive self-assembly means by which the inductor loop is moved away from an underlying substrate, typically silicon, in the final steps of inductor assembly. Such passive self-assembly does not require separate actuation or monitoring steps.

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Fan et al., "Universal MEMS Platforms for Passive RF Components: Suspended Inductors and Variable Capacitors," IEEE Proc., pp. 29-33, Eleventh Annual Int'l. Conf. MEMS, Jan. 25-29, 1998, Heidelberg, Germany.
"MEMS Technology Pursued for the Development of Micromachined Silicon Variable Inductors and Latching Accelerometers," Elec. Design, Jun. 23, 1997.

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