Article and device having an amorphous silicon containing a halo

Details Article and device having an amorphous silicon containing a halo Article and device having an amorphous silicon containing a halo

1976-09-29

1980-04-01

Miller, Jr., Stanley D.

Batteries: thermoelectric and photoelectric

Thermoelectric

Radiation pyrometer

136 89TF, 148174, 357 2, 357 30, 427 39, 427 84, 427 85, H01L 2948, H01L 2714

Patent

active

041964381

ABSTRACT:
An amorphous silicon capable of the formation of a semiconductor junction. The amorphous silicon can be fabricated by a glow discharge in a gas atmosphere including hydrogen and a deposition gas. The deposition gas has therein the elements silicon and a halogen selected from the group consisting of chlorine, bromine and iodine.

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patent: 4068020 (1978-01-01), Reuschel
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Carlson et al., "Amorphous Silicon Solar Cell", Applied Physics Letters, vol. 28, No. 11, Jun. 1, 1976, pp. 671-673.
Chittick, "Properties of Glow-Discharge Deposited Amorphous Germanium and Silicon", J. of Non-Crystalline Solids 3 (1970), North Holland Publishing Co., pp. 255-270.
Fuhs et al., "Heterojunctions of Amorphous Silicon and Silicon Single Crystals", AIP Conference Proceedings No. 20, Yorktown Heights 1974, pp. 345-350.
Stuke et al., "Amorphous and Liquid Semiconductors", Proceedings of the Fifth International Conf. on Amorphous and Liquid Semiconductors, Sep. 3-8, 1973, pp. 1-6.

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