Arsenic sulfide surface passivation of III-V semiconductors

Fishing – trapping – and vermin destroying

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

437225, 437228, 437231, 437235, 437980, 427 96, 4271262, 357 72, 357 73, H01L 2100, H01L 2102, H01L 21302, B05D 512

Patent

active

049200780

ABSTRACT:
A method of passivating GaAs and InGaAs by growing on the GaAs or InGaAs used for semiconducting devices a surface film of glassy As.sub.2 S.sub.3 which acts as a passivating layer. The film growth is preferably done by precipitating As.sub.2 S.sub.3 from a solution containing NH.sub.4 OH, so as to make it basic, and then annealing the precipitated film at a temperature between the glass transition temperature (200.degree. C.) and the melting point (315.degree. C.) of As.sub.2 S.sub.3.

REFERENCES:
patent: 4026741 (1977-05-01), Chang et al.
patent: 4095011 (1978-06-01), Hawrylo
patent: 4439464 (1984-03-01), Lauks
patent: 4447469 (1984-05-01), Peters
patent: 4560576 (1985-12-01), Lewis et al.
patent: 4751200 (1988-06-01), Gmitter
patent: 4751201 (1988-06-01), Nottenburg
"Nearly Ideal Electronic Properties of Sulfide Coated GaAs Surfaces," Applied Physics Letters, E. Yablonovitch et al., 1987, vol. 51, No. 6, pp. 439-441.
"Electronic Passivation of GaAs Surfaces Through the Formation of Arsenic-Sulfur Bonds," Applied Physics Letters, C. J. Sandroff et al., 1989, vol. 54, No. 4, pp. 362-364.
"Influence of the Substrate on the Electrical Properties of As.sub.2 S.sub.3 Films", Soviet Physics Semiconductors, 1985, Y. G. Fariver et al., vol. 19, No. 7, pp. 795-797.
"Monocrystalline Aluminum Ohmic Contact to n-GaAs by H.sub.2 S Adsorption," Applied Physics Letters, J. Massies et al., 1981, vol. 38, No. 9, pp. 693-695.
"Effects of H.sub.2 S Adsorption on Surface Properties of GaAs {100} Grown In Situ by MBE," Journal of Vacuum Science Technology, J. Massies et al., 1980, vol. 17, No. 5, pp. 1134-1140.
"Effects of Cations on the Performance of the Photoanode in the n-GaAs/K.sub.2 Se-KOH/C Semiconductor Liquid Junction Solar Cell," Journal of the Electrochemical Society, B. A. Parkinson et al., 1979, vol. 126, No. 6, pp. 954-960.
"Advances in SQUID Magnetometers," IEEE Transactions on Electron Devices, J. Clarke, 1980, vol. ED-27, No. 10, pp. 1896-1908.
"Surface Passivation of GaAs," Applied Physics Letters, H. H. Lee et al., 1989, vol. 54, No. 8, pp. 724-726.
Colclaser, R., Microelectronics: Processing and Device Design, Wiley & Sons, 1980, p. 81.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Arsenic sulfide surface passivation of III-V semiconductors does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Arsenic sulfide surface passivation of III-V semiconductors, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Arsenic sulfide surface passivation of III-V semiconductors will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-34629

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.