Arsenate dopant sources and method of making the sources

Details Arsenate dopant sources and method of making the sources Arsenate dopant sources and method of making the sources

1983-06-08

1989-01-17

Lovering, Richard D.

Stock material or miscellaneous articles

Web or sheet containing structurally defined element or...

Composite having voids in a component

156606, 252950, 4283128, 428697, 437168, 437169, B05D 302, B32B 1900, B32B 1904

Patent

active

047987642

ABSTRACT:
New arsenate compounds, compositions and solid diffusion sources for the arsenic doping of semiconductors are disclosed which comprise substances composed of a sintered arsenate that decomposes upon heating at temperatures between 500.degree.-1400.degree. C. to release As.sub.2 O.sub.5, As.sub.2 O.sub.3 and/or elemental arsenic vapors for transport to semiconductor elements as a controlled dopant.

REFERENCES:
patent: 1737114 (1929-11-01), Heath
patent: 3152025 (1964-10-01), Kramp
patent: 3287187 (1966-11-01), Rosenheinrich
patent: 3354005 (1967-11-01), Lepiane et al.
patent: 3532563 (1970-10-01), Genser
patent: 3630793 (1971-12-01), Christensen et al.
patent: 3920882 (1975-11-01), Venkatu
patent: 3923563 (1975-12-01), Venkatu
patent: 4526826 (1985-07-01), TenEyck et al.
Mellor: "A Comprehensive Treatise on Inorganic and Theoretical Chemistry", vol. IX, Longmans, Green & Co., London, 1947, p. 186.
Cotton et al., "Advanced Inorganic Chemistry", p. 383, Third Edition, 1972.
Guerin, et al., "Alkaline Earth Arsenates", C. R. Acad. Sci., vol. 214 (1942) pp. 1004-1006.
Guerin, et al., "Sur L'orthoarseniate Trimagnesiem", Bull. Soc. Chim. Fr., vol. 11 (1970) pp. 3895-3896.
Masson, et al., "Strontium Arsenates", Bull. Soc. Chim. Fr., vols. 11-12, (1977) p. 1077.

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