Array substrate, liquid crystal display device and their manufac

Details Array substrate, liquid crystal display device and their manufac Array substrate, liquid crystal display device and their manufac

1998-03-09

2000-10-24

Niebling, John F.

Semiconductor device manufacturing: process

Making device or circuit emissive of nonelectrical signal

Including integrally formed optical element

438 40, 438149, 438150, 438151, 438152, 438597, 438618, 438622, 438623, 438624, 438637, 438638, 438640, 438666, 438673, H01L 2100

Patent

active

061366242

ABSTRACT:
An array substrate typically used in a liquid crystal display device includes inter-layer insulating films thick enough to prevent step-off breakage of conductive layers at contact holes while promising a reliability. Thick inter-layer insulating films are made by stacking a film made of an inorganic material, such as silicon nitride or silicon oxide, having a low moisture permeability and thereby promising a reliability of the liquid crystal display device, and a film made of an organic material, such as acrylic resin, that can be readily stacked thick so that the inner wall of the contact hole is gently sloped with respect to the substrate surface to thereby prevent step-off breakage of a conductive layer as thin as 100 nm or less.

REFERENCES:
patent: 5895937 (1999-04-01), Su et al.
patent: 5917571 (1999-06-01), Shimada
patent: 5926235 (1999-06-01), Han et al.

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