Array substrate for a liquid crystal display device having...

Details Array substrate for a liquid crystal display device having... Array substrate for a liquid crystal display device having...

2005-03-01

2005-03-01

Wille, Douglas (Department: 2814)

Semiconductor device manufacturing: process

Chemical etching

Vapor phase etching

C438S652000

Reexamination Certificate

active

06861368

ABSTRACT:
An array substrate for a liquid crystal display device includes: a substrate; a gate electrode on the substrate; a gate insulating layer on the gate electrode; a semiconductor layer on the gate insulating layer; source and drain electrodes on the semiconductor layer, the source and drain electrodes including a copper layer as an upper layer and a barrier layer as a lower layer; a first passivation layer on the source and drain electrodes; a second passivation layer on the first passivation layer, the second passivation layer having a drain contact hole through the first passivation layer, the drain contact hole exposing the barrier layer; and a pixel electrode connected to the barrier layer through the drain contact hole.

REFERENCES:
patent: 6121156 (2000-09-01), Shamble et al.
patent: 6529251 (2003-03-01), Hibino et al.

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