Electricity: measuring and testing – Impedance – admittance or other quantities representative of... – Lumped type parameters
Patent
1992-11-16
1994-09-13
Wieder, Kenneth A.
Electricity: measuring and testing
Impedance, admittance or other quantities representative of...
Lumped type parameters
324719, 324722, 437 8, 295921, G01R 2702
Patent
active
053472268
ABSTRACT:
A semiconductor scanning resistance probe which has a support structure formed on a top surface of a substrate to form a cantilever. The support structure has a plurality of openings which extend through the support structure from a connector end to a cone end. An outer surface of the support structure at one side of each opening is cone-shaped so that an apex of the cone forms the cone end. A probe tip is formed in each probe tip opening and along the surface of the support structure. The probe tips are placed on individual semiconductor devices to extract impurity profiles.
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Bachmann Walter A.
Hale Peggy A.
Brown Glenn W.
National Semiconductor Corporation
Wieder Kenneth A.
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