Array of ultrasound transducers

Details Array of ultrasound transducers Array of ultrasound transducers

2005-12-06

2005-12-06

Budd, Mark (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S334000, C310S364000

Reexamination Certificate

active

06972510

ABSTRACT:
The invention relates to an array of ultrasound transducers which each comprise a substrate (1), a membrane (2), a first electrode (4), a piezoelectric layer (5), and a second electrode (6), wherein the substrate (1) comprises at least one opening (3) which adjoins the membrane (2) at one side, while the piezoelectric layer (5) has a high piezoelectric coupling coefficient k and is textured. The invention further relates to an ultrasound transducer and to a method of manufacturing an array of ultrasound transducers.

REFERENCES:
patent: 5265315 (1993-11-01), Hoisington et al.
patent: 5446484 (1995-08-01), Hoisington et al.
patent: 5500988 (1996-03-01), Moynihan et al.
patent: 5674742 (1997-10-01), Northrup et al.
patent: 5844287 (1998-12-01), Hassan et al.
patent: 6239536 (2001-05-01), Lakin
patent: 6620237 (2003-09-01), Hoisington

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