Array of thin film actuated mirrors for use in an optical projec

Details Array of thin film actuated mirrors for use in an optical projec Array of thin film actuated mirrors for use in an optical projec

1995-04-28

1997-05-06

Epps, Georgia Y.

Optical: systems and elements

Optical modulator

Light wave temporal modulation

359295, 359850, G02B 2600, G02B 508

Patent

active

056276737

ABSTRACT:
An array of M.times.N thin film actuated mirrors for use in an optical projection system comprises an active matrix, an array of M.times.N supporting members, and an array of M.times.N thin film actuating structures. Each of the actuating structures includes a first, an electrodisplacive, a second layers and an elastic layer, wherein the first and the seconds layers are placed on top and bottom of the electrodisplacive layer, and the elastic layer is placed on bottom of the second layer. The first layer is divided into a proximal and a distal ends. In each of the actuated mirrors, the proximal end of the first layer is connected to a conduction line pattern to thereby act as a bias electrode and the second layer is connected electrically to one of the transistors through a conduit placed in each of the supporting members to thereby act as a signal electrode. The distal end of the first layer functions as a mirror for reflecting the light beam.

REFERENCES:
patent: 5481396 (1996-01-01), Ji et al.

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