Optical: systems and elements – Optical modulator – Light wave temporal modulation
Patent
1995-10-25
1997-02-25
Ben, Loha
Optical: systems and elements
Optical modulator
Light wave temporal modulation
359291, 359221, 359846, 359855, 310328, 310366, G02B 2600
Patent
active
056064527
ABSTRACT:
An array of M.times.N thin film actuated mirrors includes an active matrix having a substrate with an array of M.times.N connecting terminals and an array of M.times.N transistors, and an array of M.times.N actuating structures, wherein each of the actuating structures being a bimorph structure, includes a second thin film electrode, a lower electrodisplacive member, an intermediate thin film electrode, an upper electrodisplacive member and a first thin film electrode. Furthermore, there is disclosed a method for the manufacture thereof, the method comprising the steps of: providing an active matrix; forming a thin film sacrificial layer on top of the active matrix; removing selectively the thin film sacrificial layer; forming a second thin film electrode layer thereon; removing selectively the second thin film electrode layer; depositing a lower electrodisplacive layer; forming an intermediate electrode layer; depositing an upper electrodisplacive layer; forming a first thin film electrode layer, thereby forming a multiple layered structure; patterning the multiple layered structure into an array of M.times.N semifinished actuating structures; and removing the thin film sacrificial layer.
REFERENCES:
patent: 3544201 (1970-12-01), Fowler et al.
patent: 4615595 (1986-10-01), Hornbeck
patent: 4793699 (1988-12-01), Tokuhara
patent: 5085497 (1992-02-01), Um et al.
patent: 5126836 (1992-06-01), Um
patent: 5159225 (1992-10-01), Um
patent: 5172262 (1992-12-01), Hornbeck
patent: 5175465 (1992-12-01), Um et al.
patent: 5185660 (1993-02-01), Um
patent: 5216537 (1993-06-01), Hornbeck
patent: 5247222 (1993-09-01), Engle
patent: 5469302 (1995-11-01), Lim
patent: 5481396 (1996-01-01), Ji et al.
Ben Loha
Daewoo Electronics Co. Ltd.
LandOfFree
Array of thin film actuated mirrors and method for the manufactu does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Array of thin film actuated mirrors and method for the manufactu, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Array of thin film actuated mirrors and method for the manufactu will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1978294