Array of thin film actuated mirrors and method for the manufactu

Optical: systems and elements – Optical modulator – Light wave temporal modulation

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359291, 359221, 359846, 359855, 310328, 310366, G02B 2600

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active

056064527

ABSTRACT:
An array of M.times.N thin film actuated mirrors includes an active matrix having a substrate with an array of M.times.N connecting terminals and an array of M.times.N transistors, and an array of M.times.N actuating structures, wherein each of the actuating structures being a bimorph structure, includes a second thin film electrode, a lower electrodisplacive member, an intermediate thin film electrode, an upper electrodisplacive member and a first thin film electrode. Furthermore, there is disclosed a method for the manufacture thereof, the method comprising the steps of: providing an active matrix; forming a thin film sacrificial layer on top of the active matrix; removing selectively the thin film sacrificial layer; forming a second thin film electrode layer thereon; removing selectively the second thin film electrode layer; depositing a lower electrodisplacive layer; forming an intermediate electrode layer; depositing an upper electrodisplacive layer; forming a first thin film electrode layer, thereby forming a multiple layered structure; patterning the multiple layered structure into an array of M.times.N semifinished actuating structures; and removing the thin film sacrificial layer.

REFERENCES:
patent: 3544201 (1970-12-01), Fowler et al.
patent: 4615595 (1986-10-01), Hornbeck
patent: 4793699 (1988-12-01), Tokuhara
patent: 5085497 (1992-02-01), Um et al.
patent: 5126836 (1992-06-01), Um
patent: 5159225 (1992-10-01), Um
patent: 5172262 (1992-12-01), Hornbeck
patent: 5175465 (1992-12-01), Um et al.
patent: 5185660 (1993-02-01), Um
patent: 5216537 (1993-06-01), Hornbeck
patent: 5247222 (1993-09-01), Engle
patent: 5469302 (1995-11-01), Lim
patent: 5481396 (1996-01-01), Ji et al.

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