Array of thin film actuated mirrors and method for the manufactu

Details Array of thin film actuated mirrors and method for the manufactu Array of thin film actuated mirrors and method for the manufactu

1997-05-19

1999-07-27

Epps, Georgia

Optical: systems and elements

Optical modulator

Light wave temporal modulation

359292, G02B 2600

Patent

active

059300256

ABSTRACT:
An inventive array of M.times.N thin film actuated mirrors includes an active matrix and an array of M.times.N actuating structures. Each of the actuating structures includes a first thin film electrode, a thin film electrodisplacive member, a second thin film electrode, an elastic member, a conduit and an insulating member. In the array, the insulating member is made of an insulating material, e.g., oxide or nitride, and is formed between top of the conduit and bottom of the first thin film electrode, thereby reducing the possibility of an electrical contact forming between the first and the second thin film electrodes.

REFERENCES:
patent: 5808782 (1998-09-01), Min

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