Array of micro-machined mass energy micro-filters for charged pa

Details Array of micro-machined mass energy micro-filters for charged pa Array of micro-machined mass energy micro-filters for charged pa

1994-11-14

1996-01-23

Berman, Jack I.

Radiant energy

Electron energy analysis

250396R, H01J 3712

Patent

active

054866979

ABSTRACT:
An energy filter for charged particles includes a stack of micro-machined wafers including plural apertures passing through the stack of wafers, focusing electrodes bounding charged particle paths through the apertures, an entrance orifice to each of the plural apertures and an exit orifice from each of the plural apertures and apparatus for biasing the focusing electrodes with an electrostatic potential corresponding to an energy pass band of the filter.

REFERENCES:
patent: 5214289 (1993-05-01), Betsui

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