Array of electrodisplacive actuated mirrors and method for the m

Details Array of electrodisplacive actuated mirrors and method for the m Array of electrodisplacive actuated mirrors and method for the m

1994-10-13

1996-09-03

Shafer, Ricky D.

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

359291, 359295, 359855, 359900, 310328, 310348, 310366, 29 2535, G02B 7182, G02B 2608, H01L 4108, H04R 1700

Patent

active

055529232

ABSTRACT:
An array of M.times.N electrodisplacive actuated mirrors for use in an optical projection system is assembled by way of: (a) preparing two identical ceramic wafers; (b) forming M identical trenches thereon; (c) interlocking and bonding together to form a ceramic block; (d) forming a composite ceramic structure from the ceramic block by polishing the top and bottom surfaces thereof: (e) providing M.times.N signal electrodes and M+1 bias electrodes on the bottom and top surfaces thereof, respectively; (f) mounting on an active matrix to thereby form an array of M.times.N actuators; (g) preparing platforms, to be formed thereon a light reflecting layer; (h) forming the light reflecting layer; (i) patterning the light reflecting layer, including the platform into an array of M.times.N mirrors; and (j) making electrical connections to thereby form the array of M.times.N electrodisplacive actuated mirrors.

REFERENCES:
patent: 4574438 (1986-03-01), Diepers et al.
patent: 5018256 (1991-05-01), Hornbeck
patent: 5083857 (1992-01-01), Hornbeck
patent: 5159225 (1992-10-01), Um
patent: 5469302 (1995-11-01), Lim

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