Array of electrically independent thin film actuated mirrors

Details Array of electrically independent thin film actuated mirrors Array of electrically independent thin film actuated mirrors

1996-05-03

1998-01-13

Ben, Loha

Optical: systems and elements

Optical modulator

Light wave temporal modulation

359291, 359295, 359846, 310328, G02B 2600

Patent

active

057085242

ABSTRACT:
An array of M.times.N thin film actuated mirrors includes an active matrix including a substrate with an array of M.times.N pairs of connecting terminals and an array of M.times.N transistors, and an array of M.times.N actuating structures, each of the actuating structures having an actuating and a light reflecting portions, wherein the actuating portion further includes a first and a second parts. Each of the actuating structures is provided with a first thin film electrode, a thin film electrodisplacive member, a second thin film electrode, an elastic member and a first and a second conduits. Since the first thin film electrode in the first part is electrically connected individually to the bias source, and the second thin film electrode is electrically connected individually to one of the transistor, each of the actuating structures is electrically disconnected with other actuating structures in the same row or column in the array, thereby allowing the bias signal and the electric signal to be applied individually to each of the thin film actuated mirrors.

REFERENCES:
patent: 5022745 (1991-06-01), Zayhowski et al.
patent: 5085497 (1992-02-01), Um et al.
patent: 5172262 (1992-12-01), Hornbeck
patent: 5175465 (1992-12-01), Um et al.
patent: 5550680 (1996-08-01), Yoon

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