Arrangement for tool equipment

Details Arrangement for tool equipment Arrangement for tool equipment

2008-07-01

2008-07-01

Rivell, John (Department: 3753)

Fluid handling

Systems

With pump

C137S565230, C029S025010

Reexamination Certificate

active

11182531

ABSTRACT:
An arrangement comprising ancillary equipment mounted to a semiconductor processing tool and service center remote from the semiconductor processing tool minimizing the local space requirements and facilitates easy access for repair.

REFERENCES:
patent: 6058852 (2000-05-01), Estvanko
patent: 6251759 (2001-06-01), Guo et al.
patent: 6277199 (2001-08-01), Lei et al.
patent: 6397883 (2002-06-01), Huntley et al.
patent: 7187994 (2007-03-01), Ashkenaz et al.
patent: 1109204 (2001-06-01), None

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