Arrangement for the testing of surfaces

Details Arrangement for the testing of surfaces Arrangement for the testing of surfaces

1997-09-09

2000-08-08

Kim, Robert H.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356360, G01B 902

Patent

active

061009792

ABSTRACT:
An interferometric measuring arrangement for the testing of surfaces with at least two synthetic holograms, wherein from an incident radiation at least two partial beams are formed of which the one, after diffraction in the first hologram, is reflected at the surface to be tested and is directed at a point of the second hologram upon which the second partial beam impinges directly so that an interference pattern that is characteristic of the surface is formed. With a simple design, it is also possible to test a surface in a blind bore in that the first hologram is configured as a reflection hologram and in that the other partial beam is a beam that is reflected at the reflection hologram with a zero-order diffraction.

REFERENCES:
patent: 5249032 (1993-09-01), Matsui et al.
patent: 5654798 (1997-08-01), Bruning
"Grazing Incidence Interferometry Applied to Measurement of Cylindrical Surfaces", in Optical Engineering, vol. 34, No. 12, 3531-3535, 1985.

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