Arrangement for the stabilization of the radiation emission...

Details Arrangement for the stabilization of the radiation emission... Arrangement for the stabilization of the radiation emission...

2006-10-17

2006-10-17

Gabor, Otilia (Department: 2884)

Radiant energy

Radiant energy generation and sources

With radiation modifying member

C372S057000

Reexamination Certificate

active

07122814

ABSTRACT:
A short-wavelength radiation is generated which is stable over time from a plasma generated by energy input into a target jet, in which intensity variations due to altered coupling of excitation radiation into the target jet are minimized. Measuring devices are provided for successive detection over time of deviations of at least one of the directions of the target jet or the energy beam from an intersection point of the two directions that is provided as an interaction point. The measuring devices have output signals which are suitable as regulating variables for the orientation of the directions on the interaction point, and actuating elements are provided for adjusting and tracking at least one of the directions of either the target jet or the energy beam depending on the output signal of the measuring devices in the manner of a control loop.

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Review of Scientific Instruments, Feb. 2003, vol. 72, No. 2, pp. 969-974, Article: “Spatial characterizaion of extreme ultraviolet plasma generated by laser excitation of xenon gas targets” Sebastian Kranzusch, et al.

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