Electric lamp and discharge devices: systems – With cathode or cathode heater supply circuit – Plural cathodes or heaters in the load device
Reexamination Certificate
2006-03-10
2010-10-05
Owens, Douglas W (Department: 2821)
Electric lamp and discharge devices: systems
With cathode or cathode heater supply circuit
Plural cathodes or heaters in the load device
C315S094000, C315S106000
Reexamination Certificate
active
07808183
ABSTRACT:
An arrangement for the regulation of the electron beam power of an electron gun, which comprises a filament cathode, a block cathode and an anode. Between the filament cathode and the block cathode is applied a first voltage, while between the block cathode and the anode a second voltage is applied. With the aid of a first closed-loop regulated system the filament cathode is regulated to a constant current value, which has a filament temperature sufficient for the maximum beam power of the block cathode. A second closed-loop regulated system, such including a block power regulator, which is acted upon by the difference between instantaneous block power value and nominal block power value, regulates the voltage between the filament cathode and the block cathode.
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Klemm Günter
Schneider Hans-Jürgen
Thiede Andreas
ALD Vacuum Technologies GmbH
Applied Materials GmbH & Co. KG
Chen Jianzi
Fulbright & Jaworski L.L.P.
Owens Douglas W
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