Arrangement for the generation of intensive short-wavelength...

Details Arrangement for the generation of intensive short-wavelength... Arrangement for the generation of intensive short-wavelength...

2006-05-31

2009-02-10

Nguyen, Kiet T (Department: 2881)

Radiant energy

Radiant energy generation and sources

With radiation modifying member

C250S493100

Reexamination Certificate

active

07488962

ABSTRACT:
The invention is directed to an arrangement for the generation of intensive short-wavelength radiation based on a gas discharge plasma. It is the object of the invention to find a novel possibility for generating intensive short-wavelength radiation, particularly EUV radiation, based on a gas discharge plasma which achieves a long life of the electrode system along with a high total efficiency of the radiation source without substantially increasing the dimensions of the discharge unit. This object is met, according to the invention, in that exclusively suitably shaped vacuum insulation areas which have the shape of an annular gap and which are formed depending on the product of gas pressure (p) and interelectrode distance (d) between the cathode and anode are provided for insulating the cathode and anode from one another in a cylindrically symmetric electrode arrangement for reliable suppression of electron arcing.

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