Arrangement for the generation of a pulsed laser beam of...

Coherent light generators – Particular beam control device – Q-switch

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C372S024000, C372S025000

Reexamination Certificate

active

11293417

ABSTRACT:
The invention is directed to an arrangement for generating a pulsed laser beam with high average output, in particular for generating a hot plasma which emits extreme ultraviolet (EUV) radiation. It is the object of the invention to find a novel possibility for generating a laser beam with a high repetition rate and average output which allows the repetition frequency and, therefore, the output of the laser system to be increased by connecting together a plurality of individual lasers having limited repetition rate without degradation of the beam quality on the target compared to that of an individual laser. This object is met, according to the invention, in that an oriented mirror surface is associated with each individual laser in such a way that a beam bundle which is emitted by each individual laser so as to be offset with respect to time and which is reflected at the mirror surface is coupled into a common beam path, and laser pulses in the common beam path are directed to a target one after the other in a regular, defined pulse sequence, and, with a continuously dynamic mirror movement for coupling the laser pulses into the common beam path, optical means are provided in the common beam path for compensating the directional change caused by the mirror movement.

REFERENCES:
patent: 4800179 (1989-01-01), Mukai
patent: 5818546 (1998-10-01), Opower et al.
patent: 199 35 404 (2001-02-01), None
patent: 09-288243 (1997-11-01), None
patent: WO 03/084014 (2003-10-01), None
patent: WO 2005/081372 (2005-09-01), None
Patent Abstracts of Japan, Publication No. 09-288243 / published on Nov. 4, 1997 “Optical Multiplexing Device and Optical Output Device” Sony Corp. (Appln No. 08-123931 / Apr. 23, 1996).

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Arrangement for the generation of a pulsed laser beam of... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Arrangement for the generation of a pulsed laser beam of..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Arrangement for the generation of a pulsed laser beam of... will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3732518

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.