Arrangement for the automatic adjustment of at least one object

Details Arrangement for the automatic adjustment of at least one object Arrangement for the automatic adjustment of at least one object

1981-08-14

1985-01-29

Britton, Howard W.

Facsimile and static presentation processing

Facsimile

Specific signal processing circuitry

358107, 358903, H04N 718

Patent

active

044969708

ABSTRACT:
An arrangement for the automatic adjustment of at least one object, for instance a semiconductor disc and a template vis-a-vis a photoelectric measuring and scanning system, and of two objects in relation to each other in step-wise projection lithography for the manufacture of semiconductor structures.
The purpose of this invention is to provide a highly accurate and at the same time quickly adjustable means for the adjustment of two objects, under the selective utilization of the different adjustment marks presently used, based on the thereby influenced light currents as well as their structure.
An image of the adjustment marks of both objects is produced by means of an optical reproduction system in the scanning plane of a photoelectric measuring and scanning system, symmetrical to a stationary axis of this system.
For obtaining the image, two image segments are situated on the stationary axis and separated by an intermediary rod, which the image segments being produced with the aid of electronical or mechanical means. There is thus produced a two-beam process. Image scanning is effected by means of a television camera tube or movable slotted carriers, wherein the two image segments can be alternately employed for producing the image by channel switching.
The video signals are processed by a computer which releases control signals to the final control elements for adjustment of the two objects.

REFERENCES:
patent: 4219844 (1980-08-01), Ohsumi
patent: 4343553 (1982-08-01), Nakagawa
patent: 4364086 (1982-12-01), Guth

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