Arrangement for testing semiconductor wafers or the like

Details Arrangement for testing semiconductor wafers or the like Arrangement for testing semiconductor wafers or the like

1992-03-25

1993-06-15

Nguyen, Vinh

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324158P, 361381, G01R 106, G01R 3102

Patent

active

052202771

ABSTRACT:
An apparatus for testing semiconductor wafers and the like includes a prober table for receiving the semiconductor wafers to be tested and a holder receiver for receiving holders for probes or test needles. The prober table is arranged within a container having an open upper portion that has a plate having an opening through which pass the probes or test needles into the container. Discharge elements are provided within the container that are connected via a connection to a source for air, gas or the like.

REFERENCES:
patent: 3710251 (1973-01-01), Hagge et al.
patent: 4665360 (1987-05-01), Phillips
patent: 4757255 (1988-07-01), Margozzi
patent: 4968931 (1990-11-01), Littlebury et al.
patent: 5010296 (1991-04-01), Okada et al.
patent: 5034688 (1991-07-01), Moulene et al.
patent: 5084671 (1992-01-01), Miyata et al.

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