Arrangement for storing, transporting and loading substrates

Details Arrangement for storing, transporting and loading substrates Arrangement for storing, transporting and loading substrates

1993-03-19

1995-01-03

Coan, James F.

Package making

Depositing articles and arranging material in preformed...

Guide or inserted form or support for article contents

53169, 532844, 532845, 414217, H01L 2100, B65B 3100

Patent

active

053774760

ABSTRACT:
Arrangement for storing and transporting substrates under clean room conditions and for loading the substrates into a clean room. The substrates are individually accommodated in cassettes which are positively stackable. By means of a lifting means, the cassettes are positioned external to a loading slot of the clean room. A lateral sealing flap in the cassette is opened and the substrate is moved into the loading slot in a substrate drawer.

REFERENCES:
patent: 3150263 (1964-09-01), Catlin
patent: 4480423 (1984-11-01), Muller
patent: 4539794 (1985-09-01), Azzaroni
patent: 4699555 (1987-10-01), Guarino
patent: 4758127 (1988-07-01), Imai et al.
patent: 4878799 (1989-11-01), Seto et al.

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