Patent
1989-04-19
1990-10-16
Hille, Rolf
357 51, 357 55, H01L 2984, H01L 2996, H01L 2702
Patent
active
049639544
ABSTRACT:
An arrangement for reducing piezo-electric effects in piezo-electric effect sensitive electrical components formed in a semiconductor body is disclosed. The piezo-electric effect sensitive component or components are located in a particular zone of the semiconductor body. The semiconductor body is in general mounted on a support. However, the zone of the semiconductor body containing the piezo-electric sensitive component or components is not attached to the support but instead is separated from the support by a space. The presence of the space results in a certain degree of mechanical isolation of the part of the semiconductor body which contains the piezo-electric effect sensitive components, whereby the negative influence of the piezo-electric effect on the long term stability of an instrument utilizing the semiconductor body is reduced.
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patent: 4517486 (1985-05-01), Andrews
K. M. Schlesier, S. A. Keneman, R. T. Mooney, "Piezoresistivity Effects in Plastic-Encapsulated Integrated Circuits", 590 RCA Review, vol. 43, Dec. 1982.
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Y. Kanda and M. Migitaka, "Effect of Mechanical Stress on the Offset Voltages of Hall Devices in Si 1C", Central Research Lab, Hitachi, Ltd., Japan.
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Halg Beat
Popovic Radivoje
Hille Rolf
LGZ Landis & Gyr Zug
Potter R.
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