Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate
2008-05-13
2008-05-13
Berman, Jack I. (Department: 2881)
Radiant energy
Radiant energy generation and sources
With radiation modifying member
C250S497100
Reexamination Certificate
active
07372057
ABSTRACT:
The invention is directed to an arrangement for providing a reproducible target flow for the energy beam-induced generation of short-wavelength radiation. It is the object of the invention to find a novel possibility for providing a reproducibly supplied target flow for the generation of a plasma that emits short-wavelength radiation which ensures a high directional stability of the target flow over a large number of individual plasma generation process for any target materials under given process conditions. According to the invention, this object is met in that a nozzle protection device is provided in the interaction chamber between the target nozzle and the interaction point for the generation of the plasma, and the nozzle protection device contains a gas pressure chamber which has an aperture along the target path for unobstructed passage of the target flow and which is filled with a buffer gas that is maintained at a pressure of some 10 mbar.
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Gaebel Kai
Hergenhan Guido
Kloepfel Diethard
Berman Jack I.
Reed Smith LLP
Smyth Andrew
XTREME technologies GmbH
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