Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Patent
1985-11-15
1987-10-27
Wan, Gene
Radiant energy
Photocells; circuits and apparatus
Photocell controls its own optical systems
250571, G01N 2186
Patent
active
047031859
ABSTRACT:
In the optical imaging of two subjects located in different object planes, at least one objective should be capable of being displaced for focusing relative to the object planes, being displaceable absolutely in a shift-free manner and with a very high positioning reproducibility. To this end, a positioning drive, particularly a piezo positioning drive, effects movement at a housing section which is displaceable relative to the object planes and at least carries the objective, whereby the displaceable housing section must be connected to the remaining, stationarily situated housing via resilient connections which are formed by elastically deformable weak points of the housing. Apparatus fashioned in such a manner are employed particularly for automatic mask adjustment in the transfer of structures in the sub micrometer range on the semiconductor wafers by way of x-ray lithography.
REFERENCES:
patent: 4253112 (1981-02-01), Domens
patent: 4616130 (1986-10-01), Omata
Domens et al., "Automatic Mask Alignment for X-ray Microlithography", Siemens Research and Development Reports, vol. 13, No. 2, 1984, pp. 43-47.
Eigenstetter Herbert
Mengel Peter
Siemens Aktiengesellschaft
Wan Gene
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