Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent
1977-02-16
1978-02-14
Anderson, Bruce C.
Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
250423R, G21K 508
Patent
active
040741400
ABSTRACT:
A workpiece to be treated by using glow discharge is mounted in a container which contains a corresponding gas or gas mixture. The container and the workpiece are respectively connected to different terminals of an electrical source, and the resulting electrical potential gradient produces ions which are accelerated for a bombardment of the exterior surface of the workpiece for hardening the exterior surface area thereof. In order to measure an equivalent of the temperature of the workpiece, a thermal sensor element is mounted within a testpiece in heat-conducting relationship therewith. The sensor element is operative for generating a signal in dependence upon the temperature detected. Wires are connected with the sensor element for conducting the detected signal from the sensor element towards the exterior of the container. These wires are located remotely from the field so as to prevent undesirable electrical interference between the field and the detected signal. The testpiece is mounted on the inside wall of the container and is connected to the negative terminal of the source so as to be treated by glow discharge, too.
REFERENCES:
patent: 2240914 (1941-05-01), Schutze
patent: 3600126 (1971-08-01), Hellund
Anderson Bruce C.
Ionit Anstalt Bernhard Berghaus
Striker Michael J.
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