Arrangement for inspecting circuit patterns drawn on a mask

Details Arrangement for inspecting circuit patterns drawn on a mask Arrangement for inspecting circuit patterns drawn on a mask

1983-09-15

1986-07-15

Wise, Edward J.

Boots, shoes, and leggings

2504922, G06F 1546, B41B 4100

Patent

active

046009965

ABSTRACT:
A mask inspection arrangement is disclosed including a magnetic disc memory for storing pattern data which has been used for operating a mask drawing apparatus, a data producing device for optically scanning a mask drawn by the mask drawing apparatus and producing measured data indicative thereof, a data converter for converting the pattern data from memory into a reference data in the form of dot pattern data for blanking an electron beam in the mask drawing apparatus, and a comparator for comparing the measured data with the reference data and determining a correlation therebetween.

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patent: 4163309 (1979-08-01), Stickler
patent: 4218142 (1980-08-01), Kryger et al.
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patent: 4280186 (1981-07-01), Hidai et al.
patent: 4305097 (1981-12-01), Doemens et al.
patent: 4387433 (1983-06-01), Cardenia et al.
patent: 4433384 (1984-02-01), Berrian et al.
patent: 4465350 (1984-08-01), Westerberg

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