Arrangement for generating extreme ultraviolet radiation by...

Details Arrangement for generating extreme ultraviolet radiation by... Arrangement for generating extreme ultraviolet radiation by...

2011-08-30

2011-08-30

Paik, Sang (Department: 3742)

Electric heating

Metal heating

By arc

C315S111210

Reexamination Certificate

active

08008595

ABSTRACT:
An arrangement for generating extreme ultraviolet radiation by an electrically operated gas discharge which achieves an improvement in the adjustment of the layer thickness when applying a molten metal to the electrode surfaces and provides better protection against the uncontrolled spreading of molten metal into the environment that is associated with an increase in the rotational speed of the electrodes. It should be possible to increase the rotational speed to the extent that unconsumed discharge zones of the electrodes are always situated in the discharge area at repetition frequencies of several kilohertz. An edge area to be covered has at least one receiving area which extends circumferentially in a closed manner along the edge of the electrode on the electrode surface and which is constructed so as to be wetting for the molten metal and to which a liquid dispensing nozzle is directed for regenerative application of the molten metal.

REFERENCES:
patent: 6051841 (2000-04-01), Partlo
patent: 6815700 (2004-11-01), Melnychuk et al.
patent: 7477673 (2009-01-01), Ziener et al.
patent: 7812542 (2010-10-01), Hergenhan et al.
patent: 2536154 (1976-11-01), None
patent: 2005/025280 (2005-03-01), None
patent: WO 2005/101924 (2005-10-01), None

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