Arrangement for generating a purified, low-turbulence air flow f

Details Arrangement for generating a purified, low-turbulence air flow f Arrangement for generating a purified, low-turbulence air flow f

1996-06-13

1998-09-29

Bushey, C. Scott

Gas separation

Combined or convertible

In environmental air enclosure

55470, 55473, B01D 4600

Patent

active

058141162

ABSTRACT:
An arrangement for generating a purified, low-turbulence air flow for supplying local clean rooms is aimed to reduce the constructional depth of an air processing installation and, in addition, to extensively prevent the transmission of vibrations from the air flow-generator to the equipment unit to be supplied. The wall of the plenum chamber located opposite an outlet opening in the plenum chamber adjoins a filter accommodated in a plenum chamber at the side for the inlet of unpurified air. A space remains open between the wall and the filter. This space communicates with the rest of the space in the plenum chamber and serves primarily to form the plenum. The arrangement is applicable in the manufacturing of integrated circuits.

REFERENCES:
patent: 3251177 (1966-05-01), Baker
patent: 3284148 (1966-11-01), Ramniceanu
patent: 3290866 (1966-12-01), Schonrock
patent: 3301167 (1967-01-01), Howard et al.
patent: 3838556 (1974-10-01), Finger
patent: 3935803 (1976-02-01), Bush
patent: 5053065 (1991-10-01), Garay et al.
patent: 5425793 (1995-06-01), Mori et al.
"Reine Arbeitszonen," catalogue of Babcock GmbH, 27 Jan. 1992 (stamped date).
"Grundlagen reinraumtechnischer Einrichtungen" by Herbert Eidam, from the periodical Technische Rundschau, 25/89, pp. 38 to 43.

Affiliated with

Also associated with

Rating

Arrangement for generating a purified, low-turbulence air flow f does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Arrangement for generating a purified, low-turbulence air flow f, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Arrangement for generating a purified, low-turbulence air flow f will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-682782