Arrangement for determining a surface structure, especially for

Details Arrangement for determining a surface structure, especially for Arrangement for determining a surface structure, especially for

1984-02-09

1988-03-01

Rosenberger, R. A.

Optics: measuring and testing

Of light reflection

With diffusion

G01B 1130

Patent

active

047281960

ABSTRACT:
An arrangement for determining the surface structure and especially the roughness of a specimen which includes an image lens system that focuses a parallel ray onto the surface to be examined with an inclined incidence direction and a lens system which reproduces the reflected light beam on a detector array. The distance of the detector array is approximately equal to the focal distance of the lens system. The distance of the surface from the lens systems is also approximately equal to the focal distance of the lens systems. The arrangement according to the invention offers the advantage that also with an areal specimen illumination as well as with greater changes of the distance between the arrangement and the surface to be examined, an unequivocal coordination exists between the angle, under which the light is reflected, and the individual detector elements.

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