Measuring and testing – With fluid pressure – Porosity or permeability
Reexamination Certificate
2005-10-11
2005-10-11
Cumming, William D. (Department: 2683)
Measuring and testing
With fluid pressure
Porosity or permeability
C261S097000, C118S7230MW
Reexamination Certificate
active
06952949
ABSTRACT:
An arrangement for coupling microwave energy into a plasma CVD coating chamber (3) disposed in a cavity resonator (1) has a microwave feed (11) and a microwave waveguide (9, 1). So that a plastic container of a size and configuration which differ to a certain degree can be effectively coated in its interior, it is provided that the arrangement is of a substantially cylindrical structure, such that provided at the rear end is a first coaxial waveguide (in the region a) with an internal conductor in the form of an antenna (12), an approximately cylindrical waveguide (in the region b) follows in the centre of the arrangement and provided at the front end (in the region c) is a second coaxial waveguide (1) with internal conductor (13), wherein gas can be introduced through a gas feed tube (13) into the second coaxial waveguide (in the region c), which gas can be activated into the plasma state by the coupled-in microwave energy, and wherein a TM-mode is produced by the antenna (12) in the plasma region (1, c).
REFERENCES:
patent: 5153406 (1992-10-01), Smith
patent: 2003/0051666 (2003-03-01), Moore et al.
patent: 2003/0094711 (2003-05-01), Moore et al.
patent: 2004/0177676 (2004-09-01), Moore
Essers Wolf
Moore Rodney
Cumming William D.
Dunn Michael L.
Tetra Laval Holdings & Finance S.A.
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