Arrangement for correcting the voltage coefficient of resistance

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148 15, 357 22, 357 48, 357 51, 357 53, H01L 2710, H01L 2976

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042635187

ABSTRACT:
Arrangements are described for correcting the voltage coefficient of resistance (VCR) of resistors integral with a semiconductor body and, more particularly, for correcting the VCR of resistors implanted in a semi-conductor body. Resistors typically comprising a resistive region of a first conductivity type formed in an isolated layer of opposite conductivity type which isolated layer, in general, includes an epitaxial layer passivated by a dielectric layer. A metal layer is formed on the dielectric layer and covers, at least partially, the resistive layer. The metal layer is brought to a suitable potential to produce opposite variations in the resistance with respect to variations created by the epitaxial layer.

REFERENCES:
patent: 4161742 (1979-07-01), Kane
patent: 4164668 (1979-08-01), Delaporte et al.
Lin, Integrated Electronics, Holden-Day Pub. Co., San Francisco, 1967, pp. 16-19, 194-199.

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