Arrangement for calibrating a network analyzer for on-wafer meas

Details Arrangement for calibrating a network analyzer for on-wafer meas Arrangement for calibrating a network analyzer for on-wafer meas

1997-09-26

1999-12-28

Do, Diep N.

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Calibration

324754, G01K 3500

Patent

active

060086564

ABSTRACT:
In an arrangement for calibrating a network analyzer for on-wafer measurement, for microwave circuits on a metallic base plate, of a wafer measurement means using calibration standards constructed in coplanar line technology on a calibration substrate. The calibration substrate is spaced above the metallic base plate.

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Data sheets for Wafer samplers: Semiautomatic High Frequency Probe System, PA200HF or Microwave Probe System PM5HF, of the Karl Suss Company, (undated).
Rosenberger, Product Note, TI 020/Apr. 18, 1996, E1.O, Calibration Substrate RCPW-LMR, REL. 20, pp. 1-4.
Zinke/Brunswick, Hochfrequenztechnik 1, 5.sup.th ed., pp. 157 or 169-175, (undated).

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