Arrangement enabling a liquid to flow evenly around a...

Details Arrangement enabling a liquid to flow evenly around a... Arrangement enabling a liquid to flow evenly around a...

2005-09-27

2005-09-27

King, Roy (Department: 1742)

Chemistry: electrical and wave energy

Apparatus

Electrolytic

C204S276000, C204S22400M, C134S157000

Reexamination Certificate

active

06949172

ABSTRACT:
The invention relates to an arrangement enabling a liquid (2) to flow evenly around a surface of a sample (3); said arrangement has a flow chamber (1) through which a liquid (2) flows via inflow and outflow pipes (7, 8). The sample (3) can be rotated about an axis of rotation by means of a rotary drive (5). A filter (13) which extends crosswise to the direction of flow of the liquid (2) and which ensures a uniform flow through the inflow and outflow pipes (7, 8) is situated in front of the inflow and outflow pipes (7, 8). The arrangement is especially suitable for depositing a homogeneous layer of a nickel/iron alloy on a silicon wafer (3). The invention relates furthermore to the use of the arrangement.

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patent: 0 856 598 (1997-07-01), None
patent: 5033196 (1993-02-01), None

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