Optics: measuring and testing – Plural test
Reexamination Certificate
2010-07-30
2011-12-06
Geisel, Kara E (Department: 2877)
Optics: measuring and testing
Plural test
C348S087000
Reexamination Certificate
active
08072586
ABSTRACT:
A focused multi-planar image acquisition in real time even while a test object is moving, is achieved with a system and a method for a focused multi-planar image acquisition in a prober. When a surface of a test object is positioned laterally in relation to tips of separated probe needles, a microscope is focused on the surface of the test object at a first time and on a plane of the probe needles at a second time. The objective lens is provided with a microscope objective lens focusing system, which can focus the objective lens, independently of a vertical adjustment drive of the microscope, on the surface of the test object in a first focal plane and in a second focal plane, which is on a level with the probe needle tips.
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Becker Axel
Busch Juliane
Hackius Ulf
Kiesewetter Joerg
Teich Michael
Cascade Microtech, Inc.
Dascenzo Intellectual Property Law, P.C.
Geisel Kara E
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