Arrangement and method for compensating emitter tip vibrations

Details Arrangement and method for compensating emitter tip vibrations Arrangement and method for compensating emitter tip vibrations

2006-10-18

2009-12-15

Souw, Bernard E (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C250S306000, C250S307000, C250S492210, C250S492200, C250S39600R, C250S310000, C250S42300F, C250S3960ML, C250S3960ML, C250S424000

Reexamination Certificate

active

07633074

ABSTRACT:
A charged particle beam apparatus with a charged particle beam source including an emitter with an emitter tip and a supporting member for supporting the emitter is provided. Further, the apparatus includes an emitter location measuring device for repeatedly measuring the location of the emitter and a deflector system for compensating variations in the location of the emitter.

REFERENCES:
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patent: 2006/0071175 (2006-04-01), Kim et al.
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European Search Report dated Jun. 28, 2006.
EP Office Action dated Apr. 28, 2008.

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